Micropumps are revolutionizing compact and autonomous monitoring systems due to their portability and efficiency. In this paper, we present a valveless piezoelectric micropump design. This micropump distributes gas and liquid using a PDMS membrane that moves in response to a force applied by a piezoelectric actuator. The proposed design aims to achieve an average flow rate between 10 μl/min and 100 μl/min, while emphasizing mobility and low energy. For these specifications, a figure of merit (FOM) is evaluated through a parametric study of piezoelectric membrane to achieve optimized micropump performance for both gas and liquid. The finite element analysis shows the optimum thickness of PZT and PDMS, delivering a significant flow rate of 79 μl/min for liquid and 50 μl/min for gas at a lower voltage of 9 V, 60 Hz. These promising results show immense potential of micropump design in diverse applications, from intricate lab-on-a-chip platforms to precise drug delivery systems, and even integration into medical and environmental sensors.
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